MTTC CLEANROOM - EQUIPMENT

Manufacturing Engineering Program Cleanroom

Current tools in the MTTC Cleanroom

Manufacturer

Model

 
Critical Point Dryer Tousimis
Automagasandri 915B
Solvent Bench  
Nanometrics Nanospec Thin Film Measurement Tool  Nanometrics  
Microscope Nikon
Optiphot 88
Single Wafer HMDS vacuum bake    
Photoresist Coater Brewer Science
CEE 100
Hotplate
Blue M Oven Convection Oven    
   
Interference Microscope Veeco Wyko
VT3300
 
   
 
Utility Bench (8-foot)  
Acid Bench Santa Clara Plastics
Spin Rinse Dryer (double stack) Verteq
Superclean 1600
Caustic Bench with KOH bath Santa Clara Plastics
1X 4-6in Contact Aligner with back side align capability Karl Suss MA6
MA6
   
 
Nikon Microscope and camera hooked to internet with mask inspection station underside lighting Nikon
Optiphot
18 wafer 4-6in Vacuum Evaporator    
Spin Rinse Dryer (double stack) Verteq
Superclean 1600
RCA Clean Bench Santa Clara Plastics
AJA sputter System 1 DC magnetron guns, 2 DC guns, and 2 RF guns, RF to chuck and Interactive gasses  
Bell Jar Vacuum Evaporator Veeco
VE 776
   
 
Four Point Probe  
Jandel

6 Tube Diffusion system
   Oxidation wet and dry Tube
   N-Dope and Drive Tube
   P-Dope and Drive Tube
   CVD Low Temperature
         Oxide Deposition Tube
   CVD PolySilicon Deposition Tube
   CVD Silicon Nitride Deposition Tube

Steed
Mustang
Parylene Coater Specialty Coating System
PDS 2010
DRIE etcher Alcatel
AMS 100
     
   
RIE Plasma Etcher March Plasma
CA 1701
Wafer Dicer ADT Model 7910
     
   
Ellispometer Ruldolph
Auto El VI
Spin Disk Confocal Microscope    
Contact Profilometer Dektak Model 8
     
 
Nikon microscope and camera hooked to internet 6 inch wafers Nikon  
Contact Aligner with deep uv mirrors OAI 500
500
Developer Bench    
     
 
CEE Coater    
Single Wafer HMDS Oven    
   
   

Scanning Electron Microscope with Electron Dispersive Spectroscopy

Phenom
Pro X with EDS