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UNM User rates & External User rates

PROCESS and TEST EQUIPMENT LIST

The UNM MTTC Cleanroom processes, including 

• photolithography steps: HMDS, resist spinning, softbake, contact exposure with front and backside alignment, develop, quick dump rinse, spin rinse drying, hardbake, maskless 3D litho (Smart Print UV), solvent strip, resist ashing 
• wet etch (dedicated KOH, SC1, SC2 and BOE baths), 
• caustic/solvent /acid benches 
• RIE plasma etch (CF4/O2), Deep Reactive Ion Etching  
• Parylene coating, 
• Diffusion processing and annealing - oxidation wet and dry, N-Dope and drive, P-Dope and drive (solid source) 
• five-source sputter system, DC, Pulsed DC, RF 
• CO2 critical point dryer, HF Vapor Etch and XeF2 etching 
• ADT wafer dicer and taper, 
• metrology (film thickness measurement, four point probe, microscopes, contact profilometer, and SEM with EDS). 
• Characterization: 4pt surface probe, wafer probe stations, waveform generator, DVM, IV curve tracer 
• Packaging (discrete), wire bonding

We encourage users to leverage our staff for small, one-off projects. Users of the cleanroom are expected to have their process steps reviewed by cleanroom staff to make sure the chemicals and gasses are compatible with those supported by the cleanroom, and that procedures are within the safety guidelines of the cleanroom.  All chemicals entering the cleanroom need to be cleared by our safety coordinator. 

 

USERS RATE STRUCTURE  

For FY-26 (effective  August 1, 2025), NM-based university researchers (academic), non-NM-based researchers (external academic), federal laboratory (non-academic) and commercial customers (non-academic), are charged for use of the MTTC Cleanroom on a monthly billing cycle per the following schedule: 

• There is no hourly fee for use of the cleanroom for teaching lab sessions directly related to state-wide university, community college and high school courses. There may be a charge for materials, depending on the number of students and the complexity of the process and cost of TA or specific technician training.   
• The Base Lab fee covers most of the equipment in the cleanroom – see the rate table for exceptions; these tools are high maintenance costs and require a surcharge. 
• Typically, on university federal grants and contracts, there will be an overhead rate charged to the cleanroom fees, however, this charge does not accrue to the MTTC Cleanroom.  These overhead rates support the rent fees paid for by the School of Engineering. 
• Commercial users of the cleanroom are expected to sign a Facilities Use Agreement (FUA) prior to use of the facility and pass all safety requirements. A PDF of this Agreement is available for consideration.   
• MTTC can run experiments/wafers for customers at the standard rates plus staff hourly rate, without the necessity of a FUA.  These users will be invoiced for time/work done.  This allows MTTC to quickly support industry.  Users are encouraged to observe MTTC staff during experimentation at no additional cost. 
• Users who need MTTC to purchase chemicals and supplies will be charged a 15% service fee on top of the material cost.   
• The cleanroom Base Lab fee applies in parallel with the tool rate, even if you are not present in the cleanroom during tool operations. Running multiple tools (hours uncapped) simultaneously will not multiply the application of the Base Lab fee.  Note that the Base Lab hours is reset to zero at the beginning of each month. 
• Users who damage equipment—such as by running power supplies at full capacity for extended periods, forcing wafers into load chambers, operating tools beyond their mechanical limits, or driving the Dektak profilometer stylus through a wafer—will be responsible for the full cost of any service required to restore the tool to proper working condition.  If you are unsure, ASK.   
• Billing will be based on calendar months.  Invoices will be mailed out by UNM, within thirty (30) days after the end of each calendar month.  Payment will be due within thirty (30) days from the date of the invoice.  Users will be barred from the cleanroom for non-payment. 
• Hours worked by individuals employed by the same company or the same university lab will be added together each month and the billing structure then applied (see Rate Table). 

 

USERS RATE TABLE

Click here for FY21 rate table page.
Click here for FY-20 rate table page.
Click here for FY-19 rate table page.

 

USERS GUIDE AND SIGN UP 

A Users Guide for the MTTC Cleanroom is available from the MTTC Cleanroom staff. 

Sign-up calendar for the scheduling of tool and fab use are required vis Google calander. Users can schedule up to one month (with the exception of course labs, these should be done for the entire semester) in advance on the rolling calendar.  Note: if you reserve a tool or time in the cleanroom and don’t show up – you will be charged. 

Hours of operation are Monday through Friday, 7:00am to 5 pm on most weekdays (pending staff availability) 

Contact Mark Hofheins or Dr. Pleil to get access to the scheduling calendar. 

Priority of scheduling is: 

1. training for student labs related to regular university and community college classes and workshops, 
2. university research and development, and 
3. commercial sector use 

 

USERS LIST  

The MTTC Cleanroom has supported a diverse group of users, including UNM undergraduate and graduate students, CNM and SIPI community college students, UNM faculty and student researchers, as well as regional high school students and faculty (through CNM dual-enrollment programs). Industry and research partners have included Advent Solar, AgilOptics, AlambrIC, BioDirection, Cosmiac, Defiant Technologies, Emcore, Gratings Inc., HT Micro Analytical, Incitor, Intel, InterCrossIP, K-Tech, LANL, Life Bioscience, Mechanical Solutions, MEMX, MicroNano Platforms, Optipulse, Optomec, Prima Innotech, Qynergy, Radiant Technologies, Rocket Labs, Senda Micro Tech, Skinfrared, Surfect, Sandia National Laboratories (SNL), 3D Glass Solutions, Trilumina, and VeraLight.  

 Italicized organizations are current users (2024-2025). 

 

CLASSES 

The MTTC cleanroom periodically offers week-long and multiweek hands-on short courses in MEMS for industry professionals, 2-year technical college students, university undergraduate and graduate students, and high school students accompanied by their faculty. These courses can include training on a variety of devices such as MEMS pressure sensors, thermal actuators, and semiconductor devices like diodes and transistors. Additional topics may cover metrology, process characterization, wire bonding, and packaging. 

The MTTC cleanroom supports a range of UNM fabrication-focused courses, including: 

• UNM ME417/517 – Microfabrication Fundamentals 
• UNM ME419/519 (cross-listed with NSME-519) 
• Special Topics/Problems: Microsystems Academic Industrial Internship Program I & II – This two-semester course sequence offers hands-on experience in microfabrication and design, simulating an internship within a microfabrication company. The objective is to equip students with the knowledge, skills, and abilities typically gained through an industry internship to better prepare them for the workforce. 
• Individual student research Special  

In addition, the cleanroom is used for introductory one- to two-session labs in the following courses: 

• UNM ENG195 – From Silicon to Systems 
• UNM ME260L – Mechanical Engineering Design II (includes manufacturing topics such as machining and microfabrication) 

For more information, please contact mpleil@unm.edu. 

 

SUPPORT 

The UNM MTTC Cleanroom and Manufacturing Engineering Program gratefully acknowledges support from the following entities: 

• State of New Mexico, for continued operating funds through the RPSP (Research and Public Service Projects, ~$550k/yr) 
• University of New Mexico, for capital funds, grant support, rent support (SOE) 
• U.S. Department of Commerce, Economic Development Administration (EDA), for capital funds, 
• National Science Foundation, for MRI funds (ECS-0521461), and Educational Grants (ATE, IGE programs) to support student and faculty professional development 
• Intel Corporation, for equipment and educational development donations 
• Next Generation Economy (NGE) industry cluster, for equipment donations, 
• Philips Semiconductor, for equipment donations, 
• AT&T, for equipment donations. 
• Federal Grants from NSF, DOE, DOD, NIH have supported research done at the MTTC. 

 

LINKS 

Support Center for Microsystems Education 
Online MTTC Safety and Equipment Training – Continuing Education