Current tools in the MTTC Cleanroom
|
Manufacturer
|
Model
|
|
|
Critical Point Dryer |
Tousimis |
Automagasandri 915B
|
Solvent Bench |
|
|
Nanometrics Nanospec Thin Film Measurement Tool |
Nanometrics |
|
Microscope |
Nikon |
Optiphot 88
|
Single Wafer HMDS vacuum bake |
|
|
Photoresist Coater |
Brewer Science |
CEE 100
|
Hotplate |
|
|
Blue M Oven Convection Oven |
|
|
|
|
|
Interference Microscope |
Veeco Wyko |
NT3300
|
|
|
|
|
|
|
|
|
Utility Bench (8-foot) |
|
|
Acid Bench |
Santa Clara Plastics |
|
Spin Rinse Dryer (double stack) |
Verteq |
Superclean 1600
|
Caustic Bench with KOH bath |
Santa Clara Plastics |
|
1X 4-6in Contact Aligner with back side align capability |
Karl Suss MA6 |
MA6
|
|
|
|
|
|
Nikon Microscope and camera hooked to internet with mask inspection station underside lighting |
Nikon |
Optiphot
|
18 wafer 4-6in Vacuum Evaporator |
|
|
Spin Rinse Dryer (double stack) |
Verteq |
Superclean 1600
|
RCA Clean Bench |
Santa Clara Plastics |
|
AJA sputter System 1 DC magnetron guns, 2 DC guns, and 2 RF guns, RF to chuck and Interactive gasses |
|
|
Bell Jar Vacuum Evaporator |
Veeco |
VE 776
|
|
|
|
|
|
Four Point Probe |
|
Jandel
|
6 Tube Diffusion system Oxidation wet and dry Tube N-Dope and Drive Tube P-Dope and Drive Tube CVD Low Temperature Oxide Deposition Tube CVD PolySilicon Deposition Tube CVD Silicon Nitride Deposition Tube
|
Steed |
Mustang
|
Parylene Coater |
Specialty Coating System |
PDS 2010
|
DRIE etcher |
Alcatel |
AMS 100
|
|
|
|
|
|
RIE Plasma Etcher |
March Plasma |
CA 1701
|
Wafer Dicer |
ADT |
Model 7910 |
|
|
|
|
|
Ellispometer |
Ruldolph |
Auto El VI
|
Spin Disk Confocal Microscope |
|
|
Contact Profilometer |
Dektak |
Model 8 |
|
|
|
|
|
Nikon microscope and camera hooked to internet 6 inch wafers |
Nikon |
|
Contact Aligner with deep uv mirrors |
OAI 500 |
500
|
Developer Bench |
|
|
|
|
|
|
|
CEE Coater |
|
|
Single Wafer HMDS Oven |
|
|
|
|
|
|
|
Scanning Electron Microscope with Electron Dispersive Spectroscopy
|
Phenom |
Pro X with EDS
|
|