MTTC CLEANROOM - EQUIPMENT

Manufacturing Training and Technology Center Cleanroom Equipment List 

Equipment description links are in RED, these will be updated moving forward

Feel free to contact Dr. Matthias Pleil for more information - mpleil@unm.edu

Updated: July 2024
 

Current tools in the MTTC Cleanroom

Manufacturer

Model

BAY 1

  
 
Critical Point Dryer Tousimis
Automagasandri 915B
Solvent Bench  
 
Microscope with Digital Camera/CD measurement Nikon
Optiphot 88
HMDS vacuum bake Osiris  Unix HVT20
Photoresist Coater CEE 
CEE 100
Hotplates (2) Chemat Technology
KW-4AH
Blue M Oven Convection Oven    
Dicing Taper ADT  
Caustic bench (BOE) with QDR  Santa Clara Plastics
 
Acid Bench 2  
 
Spin Rinse Dryer (double stack, 4in & 6in) Verteq
Superclean 1600
Caustic Bench with KOH bath and QDR Santa Clara Plastics
 
Contact Aligner with Backside Alignment Karl Suss MA6/BA6
MA6
Megasonic Cleaner Branson
5800
   
 

BAY 2

  
 
AJA Sputter System - DC magnetron, DC, RF, Pulsed DC, Metal and non-metal deposition AJA
 
Nikon Microscope with digital camera/CD measurement - for Mask measurement Nikon
Optiphot
Kurt Lesker Sputter System -- COMING SOON!  
 
Spin Rinse Dryer (double stack, 4in and 6in) Verteq
Superclean 1600

DRIE Plasma System

 Adixen
AMS100

Parylene Coater

 Special Coating Systems
PDS 2010

Four Point Probe

  Jandel
 

6 Tube Diffusion system
   Oxidation wet and dry Tube
   N-Dope and Drive Tube
   P-Dope and Drive Tube
   CVD Low Temperature
         Oxide Deposition Tube
   CVD PolySilicon Deposition Tube 
   CVD Silicon Nitride Deposition Tube 

 Steed
Mustang
 Deep Reactive Ion Etch (DRIE) Alcatel  AMS100
     

BAY 3

    
RIE Plasma Etcher  Glow Research
AutoGlow 200
XeF2 Etcher  SPTS/KLA Xactix e2
Wafer Dicer  ADT Model 7910
HF Vapor Etch  Idonus  HF VPE 150
Scanning Electron Microscope (SEM) with EDS  Nanoscience Instruments  Phenom X
Profilometer  Brucker Dektak XT
Confocal Microscope with Digital Camera    
     

Chase 3

  
 
Anneal Furnace Thermo Scientific Lindberg/Blue M Tube Furnace
     

BAY 4

  
 
Maskless Printer  Microlight 3D  Smart Print UV (SPUV)
Contact Aligner with deep uv mirrors - NA OAI 500
500
Developer Bench    
Coater with integrated bake plate  CEE  
HMDS vacuum bake  Osiris  Unix HTV 200
Optical microscope with camera/CD measurements  Nikon
 
Wire Bonder (Manual AI & Au wedge-to-wedge)  West Bond 7400A
Probe Station (4 mag micromanipulators) Wentworth Laboratories MP-0705
I-V Curve Tracer (1KV, 200W capability) Tektronix 370B
Function Generator (60 MHz, 300MS/sec) Tektronix AFG1062
     

Chase 4

    

Probe Station with Interferometer

Osciliscope, DVM, DC power supply, Waveform generator

    
 Box Furnace - up to 1100c Thermco Blue M