MTTC CLEANROOM - EQUIPMENT

Manufacturing Training and Technology Center Cleanroom Equipment List 

Equipment description links are in RED, these will be updated moving forward

Feel free to contact Dr. Matthias Pleil for more information - mpleil@unm.edu

Updated: July 2024
 

Current tools in the MTTC Cleanroom

Manufacturer

Model

BAY 1 WEST

  
 
Critical Point Dryer Tousimis
Automagasandri 915B
Solvent Bench  
 
Nanometrics Nanospec Thin Film Measurement Tool Nanometrics  
Microscope with Digital Camera/CD measurement Nikon
Optiphot 88
HMDS vacuum bake (2024) Osiris  Unix HVT20
Photoresist Coater CEE 
CEE 100
Hotplates (2)  
 
Blue M Oven Convection Oven    
Dicing Taper (2019) ADT  
Shadow Mask  
 
   
 

BAY 1 EAST

  
 
Caustic bench (BOE) with QDR  Santa Clara Plastics
 
Acid Bench 2  
 
Spin Rinse Dryer (double stack, 4in & 6in) Verteq
Superclean 1600
Caustic Bench with KOH bath and QDR Santa Clara Plastics
 
Contact Aligner with Backside Alignment Karl Suss MA6/BA6
MA6
   
 

BAY 2 WEST

  
 
AJA Sputter System - DC magnetron, DC, RF, Pulsed DC, Metal and non-metal deposition AJA
 
Nikon Microscope with digital camera/CD measurement - for Mask measurement Nikon
Optiphot
Spin Rinse Dryer (double stack, 4in and 6in) Verteq
Superclean 1600
   
 

BAY 2 EAST

  
 

Deep Reactive Ion Etch (DRIE)

 Alcatel
AMS100

Parylene Coater

 Special Coating Systems
PDS 2010

Four Point Probe

  Jandel
 

6 Tube Diffusion system
   Oxidation wet and dry Tube
   N-Dope and Drive Tube
   P-Dope and Drive Tube
   CVD Low Temperature
         Oxide Deposition Tube
   CVD PolySilicon Deposition Tube 
   CVD Silicon Nitride Deposition Tube 

 Steed
Mustang
     

BAY 3 WEST

    
RIE Plasma Etcher (2024) Glow Research
AutoGlow 200
XeF2 Etcher (2024) SPTS/KLA Xactix e2
Wafer Dicer (2018) ADT Model 7910
HF Vapor Etch (2019) Idonus  HF VPE 150

BAY 3 EAST

    
Scanning Electron Microscope (SEM) with EDS (2017) Nanoscience Instruments  Phenom X
Profilometer (2024) Brucker Dektak XT
Confocal Microscope with Digital Camera    

BAY 4 WEST

  
 
Maskless Printer (2022) Microlight 3D  Smart Print UV (SPUV)
Contact Aligner with deep uv mirrors - NA OAI 500
500
Developer Bench    
     

BAY 4 EAST

  
 
Coater with integrated bake plate  CEE  
Single Wafer HMDS Oven (2020)  Osiris  Unix HTV 200
Optical microscope with camera/CD measurements  Nikon
 
     

Chase 4

    

Probe station with Interferometer

Osciliscope, DVM, DC power supply, waveform generator (2022)