Safety Data Sheets (SDS)
Safety Data Sheets for chemicals and materials used in the MTTC Cleanroom.
| ACIDS | |
| Aluminum Etchant | |
| Chrome Etchant | |
| Copper Echant | |
| Hydrogen Fluoride | |
| Hydrochloric Acid | |
| Pad Etch | |
| PAE Etchant | |
| Potassium Hydroxide | |
| Tungsten Etchant | |
| CAUSTICS | |
| AZ 300 MIF Developer | |
| AZ 400K 1:4 Developer | |
| AZ 400K Developer | |
| AZ 400K Developer 2 | |
| Gold Etchant | |
| Photoresist Stripper AZ 400T | |
| Potassium Iodide | |
| OILS | |
| Hydrocarbon Oil | |
| Antifoam | |
| RESISTS | |
| LOR B Resist | |
| AZ P4330 RD Photoresist | |
| AZ 10XT Photoresist | |
| AZ 33XT Photoresist | |
| AZ 40XT 11D Photoresist | |
| AZ 125NXT 10A Photoresist | |
| AZ 1505 Photoresist | |
| AZ 1514-E IR Photoresist | |
| AZ 2070 Photoresist | |
| AZ 5214-E IR Photoresist | |
| AZ 9260 Photoresist | |
| AZ NLOF 2070 Photoresist | |
| AZ P4330 RD Photoresist | |
| Clariant AZ 111 XFS Photoresist | |
| CMIK Stripper | |
| LOR B Resist | |
| LOR A Resist | |
| Microposit S1813 | |
| AZ P4620 Photoresist | |
| AZ 1518 Photoresist | |
| AZ 5214 Photoresist | |
| Polyboron Solution B155 | |
| SU8 Resist 2005 | |
| SU8 Resist | |
| SOLIDS | |
| Yttruim | |
| Black Phosphorus | |
| HfO2 Hafnium Oxide | |
| Scandium | |
| Xenon Difloride | |
| SOLVENTS | |
| Acetone | |
| Acetone | |
| AZ EBR | |
| AZ Kwik Strip Remover | |
| AZ NMP Rinse | |
| Baker Aleg 310 | |
| CMIK Resist Stripper | |
| Coating FSC-M | |
| Coating FSC-M | |
| Cyclohexanone | |
| DC Low Voc Coating | |
| Developer DE1680 | |
| HTR-D2 | |
| Isopropanol | |
| Isopropyl Alcohol | |
| JSR NFR 016D2 | |
| NFR 016D2 | |
| NFR 016D2-55cP | |
| OmniCoat 2016 | |
| Propanol | |
| PRS 3000 | |
| RER 600 | |
| Resist Remover EKC830-800 | |
| NMP | |
| SU8 Developer | |
| SVC 14 Positive Resist Stripper | |